Compact Rtp Tube Furnace System with Turbomolecular Vacuum Station & Complete Accessories

Compact Rtp Tube Furnace System with Turbomolecular Vacuum Station & Complete Accessories

Compact Rtp Tube CZPT Program with Turbomolecular Vacuum Station & CZPT add-ons

TMAX-1200X-RTP-4-HVis a UL certifiable compact fast thermal processing tube (4″ I.D.) furnace with Large Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3″ diameter. The furnace is heated by 8 models of 1KW halogen light all around the processing tube with a max. heating price of max. 50C/CZPT. 50 segments precision temperature controller is built in with accuracy +/-1° C. 

CZPT construction Compact 4″ RTP Tube CZPT(Double layer steel case mullite liner)
Heating element eight pcs Halogen mild tube (D=10 L=300 T =200, mm)
Working Temp. 1100° C max. (This RTP furnace’s max holding time shall be less than 600 CZPTs at 1000ºC ~ 1100ºC, in any other case O-ring could get melting )
Max heating fee 50°  C/sec
Max cooling price 64° C/min (Below vacuum: 200 mtorr), 117° C/min (Beneath atmosphere stress)  
Heating zone 12″ duration with four” constant temperature zone within +/-1°C uniformity
System Temp. Controller


  • PID automatic manage via SCR (Silicon Managed Rectifier) power management with phase angle fired, recent limiting resistor.
  • 30 programmable segments for precise management of heating fee, cooling price and dwell time.
  • Make sure you click right here to learn why SCR is more correct than SSC (Sound state relay).
  • Built in PID Auto-Tune perform with overheating & damaged therCZPTuple broken protection.
  • More than temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature precision.
  • RS485 Communications Port.
  • Computer Handle:  
    • A MTS-02 control module is included for Pc management on this furnace.
    • The new version of Computer module is now suitable with Lab Check out 05/08/2014
    • A laptop computer Laptop can be requested for $900 collectively with the furnace. We advise purchasing a computer (notebook) from us to avoid computer software installation difficulties as we will perform installation and testing before transport. 


Quartz Tube & Sample Holder
  • Quartz Tube Dimensions: four.33″ O.D x four.05″ I.D x 16.2″ Duration
  • three” diameter Sample holder is inserted to sliding flange, which is created of quartz
  • A single 3″ diameter AlN wafer is placed in the centre of holder for annealing sample up to three” dia.
  • AlN has extremely high thermal conductivity, which gives the very best temperature uniformity in the sample spot
  • The sample holder is detachable from flange
Vacuum flange KF-D25 High Vacuum Flange is produced of stainless steel with double hello-temp. silicone O-rings, needle valves.
Sliding flange make an simple way for sample loading. 3″ Quartz sample holder.Insert-capable thermal-few for accurate measurement. 
H2o CZPT Jacket


  • CZPT water is required.
  • Make sure you make positive the flow charge of cooling water is ≥ 10L/min, h2o temp. twenty five PSI.
  • We recommend making use of the EQ-KJ5000 Series recirculating h2o chiller as a cooling system (you should order separately at relevant products beneath) to conserve drinking water.   

Warning: This RTP furnace’s max dwelling time shall be less than 600 CZPTs at 1000ºC ~ 1100ºC with tap water, normally O-ring may possibly soften. With use of a recirculating water chiller, this holding time can be prolonged to 1200 CZPTs.

Stream meter 1 flow meter is installed on the front panel to modify fuel flow from – one hundred sixty ml/min 
Electrical power enter 208-240 AC, 50/sixty Hz one section, nine KW Max. (> 60A breaker necessary)
HV Station
Substantial Vacuum Station
  • Mobile cart dimension:  600 (L) x 600 (W) x seven-hundred(W), mm
  • Max. Loading:       600 Lbs on prime
  • Molecular pump management Panel :   Lcd electronic
  • Diaphragm Pump and  Turbo Molecular Pump are installed inside the steel circumstance. 
Vacuum Diploma six.3E-5 mbar (with four” RTP tube furnace in 40 minutes)
Handle panel
  • One particular button operation – the diaphram pump and the turbo molecular pump will commence right after pressing “begin” button.
  • Method managed spining speed – the controller will manage the pace of the turbine spining up and down in accordance to the vacuum amount and leaking price of the reaction chamber.
  • Self protection – the technique will shield the pump from injury by overheating and overcurrect if the leaking charge of the response chamber is too high to obtain substantial vacuum. 


  • Liquid crystal display screen – double strains parameters checking interface make the doing work less complicated to be taken care of.



            Self testing                                                   Spinning up

CZPTt-up time two minutes
Backing Pump Quantity Movement Rate at 10 mbar 3.eight L/min for 50Hz and 4.four L/min for 60Hz 
Energy enter 110V AC or 220V AC switchable, 50/60Hz
Energy consumption Period/Max electrical power: one hundred/110Watt
CZPT Information Excess weight and Dimension RTP furnace: a hundred and ten lbs,  760 x 330 x 530mm (30″ x thirteen” x 21″ inch) L x W x H
HV station: 40 lbs,  600 x 600 x 700mm (24″ x 24″ x 28″) L x W x H
Guarantee Two a long time constrained warranty with life time support (Consumable components these kinds of as processing tubes, O-rings are not lined by the guarantee, you should order replacements at associated goods under.)
Laptop, application & WiFi Handle (Optional)
  • Model new laptop computer with Microsoft Window ten and Microsoft Office 2013 (30 times totally free trial) for fast use.
  • Labview Dependent Temperature Handle Technique permits consumer to edit temperature profile, handle heat-treatment recipe, report and plot info for MTI furnaces.
  • A wireless remote manage provides up to three hundred meters operating range.


  • Above functions are obtainable on ask for at an added expense (up to $1,000). Make sure you contact us for much more data.




  • CE Qualified
  • The furnace is prepared to move UL 61571, IEC 61571, SPE-1000 analyzed by NRTLs at additional value. Make sure you make contact with us for quote and depth info. 
  • Temperature controller is Fulfilled and CE Qualified
  • Substantial Vacuum Station is TUV Certified      

1 Standard exported package: Interior anticollision security, external export wooden box packaging.
2 CZPT by express, by air, by sea according to customers’ demands to locate the most appropriate way.
3 Responsible for the hurt during the delivery procedure, will change the harm portion for you for totally free.



Compact Rtp Tube Furnace System with Turbomolecular Vacuum Station & Complete Accessories