Compact Rtp Tube CZPT Program with Turbomolecular Vacuum Station & CZPT add-ons
TMAX-1200X-RTP-4-HVis a UL certifiable compact fast thermal processing tube (4″ I.D.) furnace with Large Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3″ diameter. The furnace is heated by 8 models of 1KW halogen light all around the processing tube with a max. heating price of max. 50C/CZPT. 50 segments precision temperature controller is built in with accuracy +/-1° C.
CZPT | construction | Compact 4″ RTP Tube CZPT(Double layer steel case mullite liner) |
Heating element | eight pcs Halogen mild tube (D=10 L=300 T =200, mm) | |
Working Temp. | 1100° C max. (This RTP furnace’s max holding time shall be less than 600 CZPTs at 1000ºC ~ 1100ºC, in any other case O-ring could get melting ) | |
Max heating fee | 50° C/sec | |
Max cooling price | 64° C/min (Below vacuum: 200 mtorr), 117° C/min (Beneath atmosphere stress) | |
Heating zone | 12″ duration with four” constant temperature zone within +/-1°C uniformity | |
System Temp. Controller
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Quartz Tube & Sample Holder |
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Vacuum flange | KF-D25 High Vacuum Flange is produced of stainless steel with double hello-temp. silicone O-rings, needle valves. Sliding flange make an simple way for sample loading. 3″ Quartz sample holder.Insert-capable thermal-few for accurate measurement. |
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H2o CZPT Jacket
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Warning: This RTP furnace’s max dwelling time shall be less than 600 CZPTs at 1000ºC ~ 1100ºC with tap water, normally O-ring may possibly soften. With use of a recirculating water chiller, this holding time can be prolonged to 1200 CZPTs. |
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Stream meter | 1 flow meter is installed on the front panel to modify fuel flow from – one hundred sixty ml/min | |
Electrical power enter | 208-240 AC, 50/sixty Hz one section, nine KW Max. (> 60A breaker necessary) | |
HV Station Substantial Vacuum Station |
Composition |
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Vacuum Diploma | six.3E-5 mbar (with four” RTP tube furnace in 40 minutes) | |
Handle panel |
Self testing Spinning up |
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CZPTt-up time | two minutes | |
Backing Pump Quantity Movement Rate at 10 mbar | 3.eight L/min for 50Hz and 4.four L/min for 60Hz | |
Energy enter | 110V AC or 220V AC switchable, 50/60Hz | |
Energy consumption | Period/Max electrical power: one hundred/110Watt | |
CZPT Information | Excess weight and Dimension | RTP furnace: a hundred and ten lbs, 760 x 330 x 530mm (30″ x thirteen” x 21″ inch) L x W x H HV station: 40 lbs, 600 x 600 x 700mm (24″ x 24″ x 28″) L x W x H |
Guarantee | Two a long time constrained warranty with life time support (Consumable components these kinds of as processing tubes, O-rings are not lined by the guarantee, you should order replacements at associated goods under.) | |
Laptop, application & WiFi Handle (Optional) |
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Compliance |
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1 Standard exported package: Interior anticollision security, external export wooden box packaging.
2 CZPT by express, by air, by sea according to customers’ demands to locate the most appropriate way.
3 Responsible for the hurt during the delivery procedure, will change the harm portion for you for totally free.