Plasma increased CVD coating system for deposition of silicon nitride, amorphous silicon and microcrystalline silicon thin films

 

Introduction of PECVD coater:

CY-PECVD-450 chemical vapor deposition adopts plasma increased chemical vapor deposition technology, which can use large-vitality plasma to advertise the reaction process, effectively enhance the reaction pace and decrease the reaction temperature.

It is suitable for depositing slim films of silicon nitride, amorphous silicon and microcrystalline silicon on diverse substrates these kinds of as optical glass, silicon, quartz and stainless steel. It has very good film-forming top quality, less pinholes and is not easy to crack. It is suited for the planning of amorphous silicon and microcrystalline silicon slim film solar mobile units. It can be widely utilised in the scientific research and small batch preparation of skinny movie supplies in Faculties and universities and scientific investigation institutes.

CZPT parameters of PECVD coater:

Variety	CY-PECVD-450
Vacuum chamber	front opening doorway,φ300mm X 300mm,stainless steel viewing window:φ100mm with baffle
Vacuum pump established	Entrance stage pump: rotary vane pump pumping pace is 1.1L/s Secondary pump: Turbo molecular pump pumping speed 600L/s
Restricting vacuum	ten–6Pa 10–4Pa(Within 30 minutes)
Vacuum(deposition)	.133~133Pa,altered according to the approach
RF power	thirteen.56MHz,500W (automatch)
Flow control	mass flowmeter(default Ar,~200sccm)
Proportions	1100mm x 800mm x1100mm

 

Depth photos of PECVD coater:

Started in 2005, HangZhou CY CZPT CZPT Co., Ltd. is a company specializing in the advancement and creation of laboratory technologies analysis equipment. The products are mixed, pressed, burned, reduce, floor, polished, coated, analytical equipment and connected consumables. CZPT contain laboratory sintering tools, coating equipment and so on. At present, it has been exported to twenty five nations and locations this kind of as the CZPT States, CZPTe, and CZPT Asia, and has been effectively received by various scientific investigation models.

We have a experienced technological innovation study and advancement group, the amount of professionals is 33, the organization has a hundred and fifty men and women, far more than five hundred square meters of business office area, the manufacturing unit covers an region of about 1,five hundred sq. meters located in HangZhou Large-tech Zone CZPTtronic CZPT Park. The merchandise are largely located in the research market, serving scientific analysis in the labs of universities and faculties, and can also customize goods according to your needs.

Q. Are you a producer or a investing firm?

A. We are expert laboratory instrument companies, have their personal design and style crew and manufacturing unit, have experienced complex expertise, and can promise the high quality of products and the best value.

Q. How is your firm’s solution right after-revenue provider technique?

A. The product guarantee interval is 12 months, we can supply life span servicing. We have skilled pre-revenue and after-sales departments that can reply to you within 24 hrs to solve any complex problems.

Q. How lengthy is your supply time? If I want to customise the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can offer CZPT solutions for our buyers. It normally takes thirty-sixty days based on the technical specs of the customized instrument.

Q. Our country’s electricity offer and plug are diverse. How do you resolve it?

A. We can provide a transformer and plug according to your regional demands in accordance to the power plug of various countries.

Q. How to pay out?

A.T / T, L / C, D / P, and so on., it is advised to use Alibaba CZPT Guarantee.

Q. How is the deal of goods? Shipping techniques?

A.one. Regular export fumigation indication picket box packaging 2. Convey, air, sea shipping and delivery in accordance to consumer specifications, uncover the most appropriate way.

Much more queries, make sure you speak to client support